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三軸平臺(tái)

產(chǎn)品詳情
NPXY100Z25-102是一款帶通孔和高速Z軸的三維納米掃描臺(tái)，掃描范圍100μm×100μm×25μm，亞納米分辨率。適用于光學(xué)測(cè)量、納米加工、AFM、光存儲(chǔ)/磁存儲(chǔ)、材料科學(xué)等應(yīng)用。
產(chǎn)品參數(shù)

Part Number 3715102
Footprint 100mm W x 100mm D x 35mm H
Diameter NA
Aperture 38mm ∅
Material Aluminum
Maximum Load 1kg
Max Force (Push/Pull) 100N/10N
Stage Mass 560g
Nanomotion Control XYZ
Closed-loop Travel 100µm|100µm|25µm
Open-loop Travel (-30 to 150 V) 130µm|130µm|35µm
Position Noise 0.3nm|0.3nm|0.1nm
Stiffness 1.3N/µm|1.3N/µm|15.5N/µm
Resonant Frequency 500Hz|500Hz|1600Hz
Settling Time 8ms|8ms|3ms
Linearity Deviation 0.01%|0.01%|0.04%
Capacitance 4.8µF|4.8µF|3.1µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.403