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兩軸平臺(tái)

產(chǎn)品詳情
NPXY300-291是一款重載大行程XY掃描臺(tái)，最大承載5kg，行程300μm×300μm，通孔尺寸95mm×85mm，而厚度僅為23mm。適用于納米加工、納米壓印、光學(xué)測(cè)量、存儲(chǔ)科學(xué)、材料科學(xué)等應(yīng)用。
產(chǎn)品參數(shù)

Part Number 3715291
Footprint 179mm X 179mm X 23mm H
Diameter NA
Aperture 85mm X 95mm
Material Aluminum
Maximum Load 5kg
Max Force (Push/Pull) 100N/20N
Stage Mass 1560g
Nanomotion Control XY
Closed-loop Travel 300µm|300µm
Open-loop Travel (-30 to 150 V) 360µm|360µm
Position Noise 1nm|1nm
Stiffness 0.7N/µm|0.7N/µm
Resonant Frequency 240Hz|240Hz
Settling Time 20ms|20ms
Linearity Deviation 0.01%|0.01%
Capacitance 8.2µF|8.2µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.402