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單軸平臺(tái)

產(chǎn)品詳情
NPZ70-207是一款閉環(huán)單軸納米Z向定位臺(tái)，70μm行程。響應(yīng)速度極快，帶中孔結(jié)構(gòu)，方便集成至光學(xué)顯微鏡上。
產(chǎn)品參數(shù)

Part Number 3715207
Footprint 85mm H x 20mm ∅
Diameter Super Invar
Material Super Invar
Maximum Load 1 kg
Max Force (Push/Pull) 100N/20N
Stage Mass 180g
Nanomotion Control Z
Closed-loop Travel 70µm
Open-loop Travel (-30 to 150 V) 100µm
Position Noise 0.5nm
Stiffness 11.0N/µm
Resonant Frequency 2000Hz
Settling Time 5ms
Linearity Deviation 0.01%
Capacitance 4.8µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.400