亚洲国产精品久久久久蜜桃-99久久99久久久99精品齐-亚洲国产成人久久精品图片-国产在线视频www色|www.ywlingyun.com

{dede:field name='position'/}
 

六軸壓電平臺

產品詳情
產品參數

Mechanical Properties
max. vertical load FV

20 N
positioner dimension

420 x 430 x 93 mm3
weight

≈ 11 kg

Travel Ranges
x

200 mm
y

200 mm
z

10 mm

Θx

6 °
Θy

7 °
Θz

24 °
 
Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm
smallest increment (Θx,y,z)

1 µrad
repeatability for full travel range 1 (x,y,z)

± 200 nm
repeatability for full travel range 1 (Θx,y,z)

± 10 µrad
repeatability for 1 mm travel range 1 (x,y,z)

± 15 nm