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六軸壓電平臺

產品詳情
產品參數(shù)

Mechanical Properties
max. vertical load FV

5 N
max. horizontal force FH

2.5 N
positioner dimension

Ø 110 x 45 mm3
weight

≈ 400 g

Travel Ranges
x

20 mm
y

20 mm
z

11 mm

Θx

21 °
Θy

24 °
Θz

38 °
 
Closed-Loop with Nanosensor (-S)
smallest increment (x,y,z)

1 nm
smallest increment (Θx,y,z)

1 µrad
repeatability for full travel range 1 (x,y,z)

± 200 nm
repeatability for full travel range 1 (Θx,y,z)

± 10 µrad
repeatability for 1 mm travel range 1 (x,y,z)

± 15 nm