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單軸平臺

產品詳情
產品參數

Mechanical Properties
max. normal force FN

5 N
max. lift force FL

5 N
positioner dimension

100 x 140 x 40 mm3
weight

650 g
Positioning
travel

± 5 (10) mm
step width

1 – 150 nm
scan range

> 500 µm
scan resolution

< 1 nm
velocity

> 5 mm/s
max. frequency

10 kHz
 
Closed-Loop with -S
sensor resolution

1 nm
repeatability

± 100 nm 1