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單軸平臺

產品詳情
產品參數

Mechanical Properties
max. normal force FN

80 N
max. lift force FL

80 N
positioner dimension

41 x 86 x 50 mm3
weight

340 g
Positioning
travel

± 0.5 (1) mm
step width

1 – 150 nm
scan range

> 500 µm
scan resolution

< 1 nm
velocity

> 1 mm/s
max. frequency

10 kHz
 
Closed-Loop with -S
sensor resolution

1 nm
repeatability

± 100 nm 1